SmartPIM

Enabling In-Situ Plasma process Control

In the plasma research and plasma based manufacturing communities it is well known that measuring the plasma is key to understanding and improving on new and existing plasma processes. Achieving such understanding involves using plasma diagnostic sensors which can be intrusive in nature and in some cases can perturb the plasma which is being measured. The ideal plasma diagnostic is one which can monitor what is happening inside a plasma chamber and yet does not have to be inserted inside the plasma.

SmartPIMTM, Scientific Systems Plasma Impedance Monitor is such a non-intrusive plasma diagnostic.

Features of SmartPIM TM

• Patented non-intrusive Transmission Line Sensor Head
• Patented Sampling Technique
• Highest Dynamic Range available in the market
• Auto Acquisition Mode
• Simultaneous display of Current, Voltage , Phase, Power and Impedance

• Non-intrusive relative plasma density measurement
• Accurate Plasma Fingerprinting
• Optisimation of plasma chamber design
• Enables development of new plasma processes

Download the SmartPIM Brochure(181K)